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Skills:
statistical data analysis , lithography simulation tools, immersion lithography, Spc, photolithography process development, low k1 imaging, Doe, material characterization, Optics, polarized illumination
Skills:
vertical NAND, data analysis systems, Doe, Spc, memory process flow
Skills:
overlay , defect mechanisms, process windows, exposure control, lithography fundamentals, SPC troubleshooting, Alignment, DNS SVG track, root-cause analysis, Canon Stepper EVG620, process monitoring
