wet strip, Vapor etch, particle counters, Spc, thickness measurement, selective chemical etching, fab metrology tools, memory process flow, electrical evaluation methods, data analysis systems, Doe, vertical NAND, Y3, dry strip

photolithography process equipment roadmaps, polarized illumination, Multi-node Multi-site program leadership, Spc, semiconductor process flows, cutting edge photolithography equipment, Memory Architecture, Doe, low k1 imaging, Optics, basic statistical data analysis, immersion lithography, metrology tools, material characterization, lithography simulation tools